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Astrov, Yu A. (1)
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Modification of GaAs surface by low-current Townsend discharge
(2010)
Gurevich, E. L.
;
Kittel, S.
;
Hergenröder, R.
;
Astrov, Yu A.
;
Portsel, L. M.
;
Lodygin, A. N.
;
Tolmachev, V. A.
;
Ankudinov, A. V.
The influence of stationary spatially homogeneous Townsend discharge on the (1 0 0) surface of semi-insulating GaAs samples is studied. Samples exposed to both electrons and ions in a nitrogen discharge
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