Metastable Defects in Proton Implanted and Annealed Silicon
Author: | Moriz Jelinek, G. Johannes, Naveen Laven, Goud Ganagona, Reinhart Job, Werner Schustereder, Hans-Joachim Schulze, Matthias Rommel, Lothar Frey |
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ISBN: | 978-3-03835-608-0 |
Parent Title (English): | P. Pichler (Editor): Gettering and Defect Engineering in Semiconductor Technology XVI (GADEST 2015) |
Publisher: | Trans Tech Publications Ltd. |
Place of publication: | Zürich |
Document Type: | Part of a Book |
Language: | English |
Year of Completion: | 2016 |
Year of first Publication: | 2016 |
Release Date: | 2019/01/11 |
First Page: | 169 |
Last Page: | 174 |
Faculties: | Elektrotechnik und Informatik (ETI) |
Publication list: | Job, Reinhart |
Licence (German): | Bibliographische Daten |