Metastable Defects in Proton Implanted and Annealed Silicon
| Author: | Moriz Jelinek, G. Johannes, Naveen Laven, Goud Ganagona, Reinhart Job, Werner Schustereder, Hans-Joachim Schulze, Matthias Rommel, Lothar Frey |
|---|---|
| ISBN: | 978-3-03835-608-0 |
| Parent Title (English): | P. Pichler (Editor): Gettering and Defect Engineering in Semiconductor Technology XVI (GADEST 2015) |
| Publisher: | Trans Tech Publications Ltd. |
| Place of publication: | Zürich |
| Document Type: | Part of a Book |
| Language: | English |
| Year of Completion: | 2016 |
| Year of first Publication: | 2016 |
| Release Date: | 2019/01/11 |
| First Page: | 169 |
| Last Page: | 174 |
| Faculties: | Elektrotechnik und Informatik (ETI) |
| Publication list: | Job, Reinhart |
| Licence (German): |  Bibliographische Daten |