Metastable Defects in Proton Implanted and Annealed Silicon

Export metadata

Additional Services

Metadaten
Author:Moriz Jelinek, G. Johannes, Naveen Laven, Goud Ganagona, Reinhart Job, Werner Schustereder, Hans-Joachim Schulze, Matthias Rommel, Lothar Frey
ISBN:978-3-03835-608-0
Parent Title (English):P. Pichler (Editor): Gettering and Defect Engineering in Semiconductor Technology XVI (GADEST 2015)
Publisher:Trans Tech Publications Ltd.
Place of publication:Z├╝rich
Document Type:Part of a Book
Language:English
Year of Completion:2016
Year of first Publication:2016
Release Date:2019/01/11
First Page:169
Last Page:174
Faculties:Elektrotechnik und Informatik (ETI)
Publication list:Job, Reinhart
Licence (German):License LogoBibliographische Daten