Imaging Superjunctions in CoolMOS™ Devices using Electron Beam Induced Current
| Author: | Stefan Kirnstötter, Martin Faccinelli, Peter Hadley, Reinhart Job, Werner Schustereder, G. Johannes, Hans-Joachim Laven |
|---|---|
| Parent Title (Multiple languages): | G. Wirth, N. Morimoto, D. Vasileska (Editors): Microelectronics Technology and Devices - SBMicro 2012, ECS Transactions <u>49</u>(1) |
| Document Type: | Part of a Book |
| Language: | Multiple languages |
| Year of Completion: | 2012 |
| Year of first Publication: | 2012 |
| Release Date: | 2019/01/11 |
| First Page: | 475 |
| Last Page: | 481 |
| Institutes: | Elektrotechnik und Informatik (ETI) |
| Publication list: | Job, Reinhart |
| Licence (German): |  Bibliographische Daten |
