Imaging Superjunctions in CoolMOS™ Devices using Electron Beam Induced Current

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Author:Stefan Kirnstötter, Martin Faccinelli, Peter Hadley, Reinhart Job, Werner Schustereder, G. Johannes, Hans-Joachim Laven
Parent Title (Multiple languages):G. Wirth, N. Morimoto, D. Vasileska (Editors): Microelectronics Technology and Devices - SBMicro 2012, ECS Transactions <u>49</u>(1)
Document Type:Part of a Book
Language:Multiple languages
Year of Completion:2012
Year of first Publication:2012
Release Date:2019/01/11
First Page:475
Last Page:481
Faculties:Elektrotechnik und Informatik (ETI)
Publication list:Job, Reinhart
Licence (German):License LogoBibliographische Daten