@incollection{KirnstoetterFaccinelliHadleyetal.2012,
  author    = {Stefan Kirnst{\"o}tter and Martin Faccinelli and Peter Hadley and Reinhart Job and Werner Schustereder and G. Johannes and Hans-Joachim Laven},
  title     = {Imaging Superjunctions in CoolMOS\&\#8482; Devices using Electron Beam Induced Current},
  booktitle = {G. Wirth, N. Morimoto, D. Vasileska (Editors): Microelectronics Technology and Devices - SBMicro 2012, ECS Transactions <u>49</u>(1)},
  year      = {2012},
}