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A New Method to Increase the Doping Efficiency of Proton Implantation in a High-Dose Regime
(2014)
Jelinek, Moriz
;
Johannes, G.
;
Laven, Reinhart
;
Job, Werner
;
Schustereder, Hans-Joachim
;
Schulze, Mathias
;
Rommel, Lothar
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