Pressure Sensor Systems for Wide Pressure Ranges Integrated by a Combined CMOS- and MEMS-Technology
| Author: | Wolfgang Schreiber-Prillwitz, Reinhart Job |
|---|---|
| Parent Title (English): | Journal of Integrated Circuits and Systems |
| Document Type: | Article |
| Language: | English |
| Year of Completion: | 2013 |
| Year of first Publication: | 2013 |
| Release Date: | 2019/01/11 |
| Volume: | 8 |
| Issue: | 2 |
| First Page: | 83 |
| Last Page: | 88 |
| Institutes: | Elektrotechnik und Informatik (ETI) |
| Publication list: | Job, Reinhart |
| Licence (German): |  Bibliographische Daten |
