Development of a Robust Design for Wet Etched Cointegrated Pressure Sensor Systems
| Author: | Wofgang Schreiber-Prillwitz, Mikko Saukoski, Gerhard Chmiel, Reinhart Job |
|---|---|
| Parent Title (English): | F. W. DelRio, C. Eberl, M. P. de Boer, E. P. Guesev (Editors): Microelectromechanical Systems - Materials and Devices IV, MRS Symposium Proceedings Series Vol. 1299 |
| Document Type: | Part of a Book |
| Language: | English |
| Year of Completion: | 2011 |
| Year of first Publication: | 2011 |
| Release Date: | 2019/01/11 |
| First Page: | 129 |
| Last Page: | 134 |
| Institutes: | Elektrotechnik und Informatik (ETI) |
| Publication list: | Job, Reinhart |
| Licence (German): |  Bibliographische Daten |
