Materialspezifische Effekte und Limitierung bei der Mikrostrukturierung mit ps-Laserstrahlung und Scanneroptik
| Author: | J. Hildenhagen, M. Smarra, K. Dickmann |
|---|---|
| Parent Title (German): | Scientific Reports |
| Publisher: | Journal of the University of Appl. Sciences |
| Place of publication: | Mittweida |
| Document Type: | Part of a Book |
| Language: | German |
| Year of Completion: | 2012 |
| Year of first Publication: | 2012 |
| Release Date: | 2019/01/11 |
| Edition: | 2 |
| First Page: | 66 |
| Last Page: | 69 |
| Faculties: | Physikingenieurwesen (PHY) |
| Licence (German): |  Bibliographische Daten |