Development process for MEMS pressure sensors for standarized CMOS read-out circuitry
| Author: | Wolfgang Schreiber-Prillwitz, Reinhart Job |
|---|---|
| DOI: | https://doi.org/10.1109/SBCCI.2016.7724037 |
| Parent Title (English): | 29th Symposium on Integrated Circuits and Systems Design (SBCCI), IEEE Conference Publications |
| Document Type: | Part of a Book |
| Language: | English |
| Year of Completion: | 2016 |
| Year of first Publication: | 2016 |
| Release Date: | 2019/01/11 |
| First Page: | 1 |
| Last Page: | 6 |
| Faculties: | Elektrotechnik und Informatik (ETI) |
| Publication list: | Job, Reinhart |
| Licence (German): |  Bibliographische Daten |