Designing MEMS Pressure Sensors with Integrated Circuitry on Silicon for Miscellaneous Applications
Author: | Wolfgang Schreiber-Prillwitz, Reinhart Job |
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DOI: | https://doi.org/10.1109/LASCAS.2013.6519006 |
Parent Title (English): | 2013 IEEE Fourth Latin American Symposium on Circuits and Systems (LASCAS) |
Document Type: | Part of a Book |
Language: | English |
Year of Completion: | 2013 |
Year of first Publication: | 2013 |
Release Date: | 2019/01/11 |
First Page: | 1 |
Last Page: | 4 |
Faculties: | Elektrotechnik und Informatik (ETI) |
Publication list: | Job, Reinhart |
Licence (German): | Bibliographische Daten |