Improvement of Integrated Pressure Sensor Systems Fabricated by a Combined CMOS- and MEMS-Technology with regard to Low Pressure Ranges
| Author: | Wofgang Schreiber-Prillwitz, Reinhart Job |
|---|---|
| Parent Title (English): | G. Wirth, N. Morimoto, D. Vasileska (Editors): Microelectronics Technology and Devices - SBMicro 2012, ECS Transactions <u>49</u>(1) |
| Document Type: | Part of a Book |
| Language: | English |
| Year of Completion: | 2012 |
| Year of first Publication: | 2012 |
| Release Date: | 2019/01/11 |
| First Page: | 417 |
| Last Page: | 424 |
| Faculties: | Elektrotechnik und Informatik (ETI) |
| Publication list: | Job, Reinhart |
| Licence (German): |  Bibliographische Daten |