Deep-Level Defects in High-Dose Proton Implanted and High-Temperature Annealed Silicon
| Author: | Moriz Jelinek, G. Johannes, Mathias Laven, Werner Rommel, Hans-Joachim Schustereder, Lother Schulze, Reinhart Frey |
|---|---|
| Parent Title (English): | E. Simoen, C. Claeys, O. Kakatsuka, R. Falster, C. Mazuré (Editors): High Purity Silicon XIII, ECS Transactions <u>64</u>(11) |
| Document Type: | Part of a Book |
| Language: | English |
| Year of Completion: | 2014 |
| Year of first Publication: | 2014 |
| Release Date: | 2019/01/11 |
| First Page: | 173 |
| Last Page: | 185 |
| Faculties: | Elektrotechnik und Informatik (ETI) |
| Publication list: | Job, Reinhart |
| Licence (German): |  Bibliographische Daten |