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Influence of post hydrogenation upon electrical, optical and structural properties of hydrogen less sputter deposited amorphous silicon

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Author:Sebastian Gerke, H.-W. Becker, D. Rogalla, F. Singer, N. Brinkmann, S Fritz, Adnan Hammud, P. Keller, D. Skorka, D. Sommer, C. Weiß, S. Flege, Giso Hahn, Reinhard Job, Barbara Terheiden
DOI:https://doi.org/10.1016/j.tsf.2015.11.063
Parent Title (English):Thin Solid Films
Document Type:Article
Language:English
Year of Completion:2016
Year of first Publication:2016
Release Date:2019/01/11
Volume:598
First Page:161
Last Page:169
Faculties:Elektrotechnik und Informatik (ETI)
Publication list:Job, Reinhart
Licence (German):License LogoBibliographische Daten