Bias-plasma for RF magnetron sputter deposition of passivating amorphous silicon layers
| Author: | Sebastian Gerke, Giso Hahn, Reinhart Job, Barbara Terheiden |
|---|---|
| DOI: | https://doi.org/10.1016/j.egypro.2015.12.302 |
| Parent Title (English): | Energy Procedia |
| Document Type: | Article |
| Language: | English |
| Year of Completion: | 2015 |
| Year of first Publication: | 2015 |
| Release Date: | 2019/01/11 |
| Volume: | 77 |
| First Page: | 75 |
| Last Page: | 82 |
| Faculties: | Elektrotechnik und Informatik (ETI) |
| Publication list: | Job, Reinhart |
| Licence (German): |  Bibliographische Daten |