Fundamentals of Laser-Assisted Micro and Nanotechnologies: Selective Ablation of Thin Films by Pulsed Laser
Author: | Andreas Ostendorf, Evgeny L. Gurevich, Xiao Shizhou |
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ISBN: | 978-3-319-05987-7 |
Parent Title (German): | Fundamentals of Laser-Assisted Micro- and Nanotechnologies |
Publisher: | Springer |
Place of publication: | Berlin |
Document Type: | Part of a Book |
Language: | English |
Year of Completion: | 2014 |
Year of first Publication: | 2014 |
Release Date: | 2019/11/15 |
First Page: | 201 |
Last Page: | 219 |
Faculties: | Physikingenieurwesen (PHY) |
Publication list: | Gurevich, Evgeny |
Licence (German): | Bibliographische Daten |