Deep-Level Defects in High-Dose Proton Implanted and High-Temperature Annealed Silicon
Author: | Moriz Jelinek, G. Johannes, Mathias Laven, Werner Rommel, Hans-Joachim Schustereder, Lother Schulze, Reinhart Frey |
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Parent Title (English): | E. Simoen, C. Claeys, O. Kakatsuka, R. Falster, C. Mazuré (Editors): High Purity Silicon XIII, ECS Transactions <u>64</u>(11) |
Document Type: | Part of a Book |
Language: | English |
Year of Completion: | 2014 |
Year of first Publication: | 2014 |
Release Date: | 2019/01/11 |
First Page: | 173 |
Last Page: | 185 |
Faculties: | Elektrotechnik und Informatik (ETI) |
Publication list: | Job, Reinhart |
Licence (German): | Bibliographische Daten |