Fundamentals of Laser-Assisted Micro and Nanotechnologies: Selective Ablation of Thin Films by Pulsed Laser
| Author: | Andreas Ostendorf, Evgeny L. Gurevich, Xiao Shizhou |
|---|---|
| ISBN: | 978-3-319-05987-7 |
| Parent Title (German): | Fundamentals of Laser-Assisted Micro- and Nanotechnologies |
| Publisher: | Springer |
| Place of publication: | Berlin |
| Document Type: | Part of a Book |
| Language: | English |
| Year of Completion: | 2014 |
| Year of first Publication: | 2014 |
| Release Date: | 2019/11/15 |
| First Page: | 201 |
| Last Page: | 219 |
| Faculties: | Physikingenieurwesen (PHY) |
| Publication list: | Gurevich, Evgeny |
| Licence (German): |  Bibliographische Daten |