A New Method to Increase the Doping Efficiency of Proton Implantation in a High-Dose Regime
Author: | Moriz Jelinek, G. Johannes, Reinhart Laven, Werner Job, Hans-Joachim Schustereder, Mathias Schulze, Lothar Rommel |
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Parent Title (English): | E. Simoen, C. Claeys, O. Kakatsuka, R. Falster, C. Mazuré (Editors): High Purity Silicon XIII, ECS Transactions 64(11) |
Document Type: | Part of a Book |
Language: | English |
Year of Completion: | 2014 |
Year of first Publication: | 2014 |
Release Date: | 2019/01/11 |
First Page: | 199 |
Last Page: | 208 |
Faculties: | Elektrotechnik und Informatik (ETI) |
Publication list: | Job, Reinhart |
Licence (German): | Bibliographische Daten |