Development process for MEMS pressure sensors for standarized CMOS read-out circuitry

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Author:Wolfgang Schreiber-Prillwitz, Reinhart Job
Parent Title (English):29th Symposium on Integrated Circuits and Systems Design (SBCCI), IEEE Conference Publications
Document Type:Part of a Book
Year of Completion:2016
Year of first Publication:2016
Release Date:2019/01/11
First Page:1
Last Page:6
Faculties:Elektrotechnik und Informatik (ETI)
Publication list:Job, Reinhart
Licence (German):License LogoBibliographische Daten