Bias-plasma for RF magnetron sputter deposition of passivating amorphous silicon layers
Author: | Sebastian Gerke, Giso Hahn, Reinhart Job, Barbara Terheiden |
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DOI: | https://doi.org/10.1016/j.egypro.2015.12.302 |
Parent Title (English): | Energy Procedia |
Document Type: | Article |
Language: | English |
Year of Completion: | 2015 |
Year of first Publication: | 2015 |
Release Date: | 2019/01/11 |
Volume: | 77 |
First Page: | 75 |
Last Page: | 82 |
Institutes: | Elektrotechnik und Informatik (ETI) |
Publication list: | Job, Reinhart |
Licence (German): | ![]() |