A New Method to Increase the Doping Efficiency of Proton Implantation in a High-Dose Regime
| Author: | Moriz Jelinek, G. Johannes, Reinhart Laven, Werner Job, Hans-Joachim Schustereder, Mathias Schulze, Lothar Rommel |
|---|---|
| Parent Title (English): | E. Simoen, C. Claeys, O. Kakatsuka, R. Falster, C. Mazuré (Editors): High Purity Silicon XIII, ECS Transactions 64(11) |
| Document Type: | Part of a Book |
| Language: | English |
| Year of Completion: | 2014 |
| Year of first Publication: | 2014 |
| Release Date: | 2019/01/11 |
| First Page: | 199 |
| Last Page: | 208 |
| Faculties: | Elektrotechnik und Informatik (ETI) |
| Publication list: | Job, Reinhart |
| Licence (German): |  Bibliographische Daten |