A New Method to Increase the Doping Efficiency of Proton Implantation in a High-Dose Regime

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Author:Moriz Jelinek, G. Johannes, Reinhart Laven, Werner Job, Hans-Joachim Schustereder, Mathias Schulze, Lothar Rommel
Parent Title (English):E. Simoen, C. Claeys, O. Kakatsuka, R. Falster, C. Mazuré (Editors): High Purity Silicon XIII, ECS Transactions 64(11)
Document Type:Part of a Book
Year of Completion:2014
Year of first Publication:2014
Release Date:2019/01/11
First Page:199
Last Page:208
Faculties:Elektrotechnik und Informatik (ETI)
Publication list:Job, Reinhart
Licence (German):License LogoBibliographische Daten