Deep-Level Defects in High-Dose Proton Implanted and High-Temperature Annealed Silicon

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Author:Moriz Jelinek, G. Johannes, Mathias Laven, Werner Rommel, Hans-Joachim Schustereder, Lother Schulze, Reinhart Frey
Parent Title (English):E. Simoen, C. Claeys, O. Kakatsuka, R. Falster, C. Mazuré (Editors): High Purity Silicon XIII, ECS Transactions <u>64</u>(11)
Document Type:Part of a Book
Year of Completion:2014
Year of first Publication:2014
Release Date:2019/01/11
First Page:173
Last Page:185
Faculties:Elektrotechnik und Informatik (ETI)
Publication list:Job, Reinhart
Licence (German):License LogoBibliographische Daten