DLTS Characterization of Proton Implanted Silicon under Varying Annealing Conditions
| Author: | G. Johannes, Moriz Laven, Reinhart Jelinek, Hans-Joachim Job, Werner Schulze, Stefan Schustereder, Mathias Kirnstötter, Lothar Rommel |
|---|---|
| Parent Title (English): | Physica Status Solidi (b) |
| Document Type: | Article |
| Language: | English |
| Year of Completion: | 2014 |
| Year of first Publication: | 2014 |
| Release Date: | 2019/01/11 |
| Volume: | 251 |
| Issue: | 11 |
| First Page: | 2189 |
| Last Page: | 2192 |
| Faculties: | Elektrotechnik und Informatik (ETI) |
| Publication list: | Job, Reinhart |
| Licence (German): |  Bibliographische Daten |