Designing MEMS Pressure Sensors with Integrated Circuitry on Silicon for Miscellaneous Applications
| Author: | Wolfgang Schreiber-Prillwitz, Reinhart Job |
|---|---|
| DOI: | https://doi.org/10.1109/LASCAS.2013.6519006 |
| Parent Title (English): | 2013 IEEE Fourth Latin American Symposium on Circuits and Systems (LASCAS) |
| Document Type: | Part of a Book |
| Language: | English |
| Year of Completion: | 2013 |
| Year of first Publication: | 2013 |
| Release Date: | 2019/01/11 |
| First Page: | 1 |
| Last Page: | 4 |
| Faculties: | Elektrotechnik und Informatik (ETI) |
| Publication list: | Job, Reinhart |
| Licence (German): |  Bibliographische Daten |