Designing MEMS Pressure Sensors with Integrated Circuitry on Silicon for Miscellaneous Applications

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Author:Wolfgang Schreiber-Prillwitz, Reinhart Job
Parent Title (English):2013 IEEE Fourth Latin American Symposium on Circuits and Systems (LASCAS)
Document Type:Part of a Book
Year of Completion:2013
Year of first Publication:2013
Release Date:2019/01/11
First Page:1
Last Page:4
Faculties:Elektrotechnik und Informatik (ETI)
Publication list:Job, Reinhart
Licence (German):License LogoBibliographische Daten