Improvement of Integrated Pressure Sensor Systems Fabricated by a Combined CMOS- and MEMS-Technology with regard to Low Pressure Ranges

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Author:Wofgang Schreiber-Prillwitz, Reinhart Job
Parent Title (English):G. Wirth, N. Morimoto, D. Vasileska (Editors): Microelectronics Technology and Devices - SBMicro 2012, ECS Transactions <u>49</u>(1)
Document Type:Part of a Book
Year of Completion:2012
Year of first Publication:2012
Release Date:2019/01/11
First Page:417
Last Page:424
Faculties:Elektrotechnik und Informatik (ETI)
Publication list:Job, Reinhart
Licence (German):License LogoBibliographische Daten