Investigation of Doping Type Conversion and Diffusion Length Extraction of Proton Implanted Silicon by EBIC

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Author:Stefan Kirnstötter, Martin Faccinelli, Peter Hadley, Reinhart Job, Werner Schustereder, G. Johannes, Hans-Joachim Laven
Parent Title (English):E. Simoen, C. L. Claeys, P. Stallhofer, R. Falster, C. Mazuré (Editors): High Purity Silicon 12, ECS Transactions <u>50</u>(5)
Document Type:Part of a Book
Year of Completion:2012
Year of first Publication:2012
Release Date:2019/01/11
First Page:115
Last Page:120
Faculties:Elektrotechnik und Informatik (ETI)
Publication list:Job, Reinhart
Licence (German):License LogoBibliographische Daten