Investigation of Doping Type Conversion and Diffusion Length Extraction of Proton Implanted Silicon by EBIC
| Author: | Stefan Kirnstötter, Martin Faccinelli, Peter Hadley, Reinhart Job, Werner Schustereder, G. Johannes, Hans-Joachim Laven |
|---|---|
| Parent Title (English): | E. Simoen, C. L. Claeys, P. Stallhofer, R. Falster, C. Mazuré (Editors): High Purity Silicon 12, ECS Transactions <u>50</u>(5) |
| Document Type: | Part of a Book |
| Language: | English |
| Year of Completion: | 2012 |
| Year of first Publication: | 2012 |
| Release Date: | 2019/01/11 |
| First Page: | 115 |
| Last Page: | 120 |
| Institutes: | Elektrotechnik und Informatik (ETI) |
| Publication list: | Job, Reinhart |
| Licence (German): |  Bibliographische Daten |
