Development of a Robust Design for Wet Etched Cointegrated Pressure Sensor Systems

Export metadata

Additional Services

Author:Wofgang Schreiber-Prillwitz, Mikko Saukoski, Gerhard Chmiel, Reinhart Job
Parent Title (English):F. W. DelRio, C. Eberl, M. P. de Boer, E. P. Guesev (Editors): Microelectromechanical Systems - Materials and Devices IV, MRS Symposium Proceedings Series Vol. 1299
Document Type:Part of a Book
Year of Completion:2011
Year of first Publication:2011
Release Date:2019/01/11
First Page:129
Last Page:134
Faculties:Elektrotechnik und Informatik (ETI)
Publication list:Job, Reinhart
Licence (German):License LogoBibliographische Daten