Wittrock, Ulrich
Filtern
Jahr
- 2020 (2) (entfernen)
Publikationstyp
- Beitrag in einer (wissenschaftlichen) Zeitschrift (2) (entfernen)
Schlagworte
- deformable mirrors (2) (entfernen)
We recently presented a novel unimorph deformable mirror which allows for dynamic focus shift with an actuation rate of 2 kHz. Such mirrors suffer from hysteresis and creep. Therefore, they have to be operated in closed-loop. For this purpose, we developed a defocus sensor based on an astigmatic detection system. In this paper, we present the sensor design and discuss its performance.
On-the-fly remote laser processing plays an increasingly important role in modern fabrication techniques. These processes require guiding of the focus of a laser beam along the contours of the workpiece in three dimensions.
State-of-the-art galvanometer scanners already provide highly dynamic and precise transverse x−y beam steering. However, longitudinal focus shifting (“z-shifting”) relying on conventional optics is restricted to a bandwidth of a few hundred Hz. We have developed and manufactured a fast piezo-based z-shifting mirror with diffraction-limited surface fidelity providing a focus shift of 1z> 60 mm with an actuation rate of 2 kHz.