Material specific effects and limitations during ps-laser generation of micro structures
Author: | J. Hildenhagen, U. Engelhardt, M. Smarra, K. Dickmann |
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DOI: | https://doi.org/10.1117/12.905948 |
ISBN: | 978-0-8194-8890-9 |
Parent Title (English): | Proceedings Volume 8247, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XII |
Publisher: | SPIE |
Place of publication: | USA |
Document Type: | Part of a Book |
Language: | English |
Year of Completion: | 2012 |
Year of first Publication: | 2012 |
Release Date: | 2019/01/11 |
First Page: | 824711, S. 1 |
Last Page: | 7 |
Faculties: | Physikingenieurwesen (PHY) |
Licence (German): | Bibliographische Daten |