Fast focus-shifter based on a unimorph deformable mirror
- On-the-fly remote laser processing plays an increasingly important role in modern fabrication techniques. These processes require guiding of the focus of a laser beam along the contours of the workpiece in three dimensions. State-of-the-art galvanometer scanners already provide highly dynamic and precise transverse x−y beam steering. However, longitudinal focus shifting (“z-shifting”) relying on conventional optics is restricted to a bandwidth of a few hundred Hz. We have developed and manufactured a fast piezo-based z-shifting mirror with diffraction-limited surface fidelity providing a focus shift of 1z> 60 mm with an actuation rate of 2 kHz.
| Author: | Sven Verpoort, Matthias Bittner, Ulrich Wittrock |
|---|---|
| URL: | https://www.osapublishing.org/ao/abstract.cfm?uri=ao-59-23-6959 |
| DOI: | https://doi.org/10.1364/AO.397495 |
| ISSN: | 1559-128X |
| Parent Title (English): | Applied Optics |
| Document Type: | Article |
| Language: | English |
| Date of Publication (online): | 2020/08/13 |
| Year of first Publication: | 2020 |
| Provider of the Publication Server: | FH Münster - University of Applied Sciences |
| Creating Corporation: | Optical Society of America |
| Release Date: | 2020/08/13 |
| Tag: | beam steering; deformable mirrors; laser machining; laser materials processing; optical components |
| Volume: | 59 |
| Issue: | 23 |
| First Page: | 6959 |
| Last Page: | 6965 |
| Faculties: | Physikingenieurwesen (PHY) |
| Publication list: | Wittrock, Ulrich |
| Licence (German): |  Bibliographische Daten |