Novel unimorph deformable mirror for solid state laser resonators
- We present a novel unimorph deformable mirror with a diameter of only 10 mm that will be used in adaptive resonators of high power solid state lasers. The relationship between applied voltage and deformation of a unimorph mirror depends on the piezoelectric material properties, layer thicknesses, boundary conditions, and the electrode pattern. An analytical equation for the deflection of the piezoelectric unimorph structure is derived, based on the electro-elastic and thin plate theory. The validity of the proposed analytical model has been proven by numerical finite-element modelling and experimental results. Our mirror design has been optimized to obtain the highest possible stroke and a high resonance frequency.
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Copyright (2009) Society of Photo Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
| Author: | Sven Verpoort, Petra Welp, Ulrich Wittrock |
|---|---|
| URN: | urn:nbn:de:hbz:836-opus-6504 |
| DOI: | https://doi.org/10.25974/fhms-650 |
| DOI of original publication: | https://doi/org/10.1117/12.810135 |
| Parent Title (German): | MEMS Adaptive Optics III, Proc. SPIE |
| Publisher: | SPIE |
| Document Type: | Conference Proceeding |
| Language: | English |
| Date of Publication (online): | 2013/06/06 |
| Year of first Publication: | 2009 |
| Provider of the Publication Server: | FH Münster - University of Applied Sciences |
| Release Date: | 2013/06/06 |
| Volume: | 72090N |
| Faculties: | Physikingenieurwesen (PHY) |
| Dewey Decimal Classification: | 6 Technik, Medizin, angewandte Wissenschaften / 62 Ingenieurwissenschaften / 620 Ingenieurwissenschaften und zugeordnete Tätigkeiten |
| Publication list: | Wittrock, Ulrich |
| Licence (German): |  Zweitveroeffentlichung |