Open Access

Sven Verpoort, Ulrich Wittrock

• Over the past 5 years we have developed a new type of unimorph deformable mirror. The main advantages of this mirror technology are · very low surface scattering due to the use of superpolished glass · excellent coatings, even suitable for high power lasers, can be applied · active diameter of the mirrors can be between 10 mm and 100 mm · large strokes can be achieved even for small mirror diameters · integrated monolithic tip/tilt functionality based on a spiral arm design We have modeled these mirrors by analytical models as well as by the finite element method. This allows us to quickly design new mirrors tailored to specific applications. One example is a mirror for laser applications that has a diameter of 10 mm and can achieve a stroke in defocus mode of 5 μm. The stroke for these mirrors scales as the square of the mirror diameter, meaning that we can achieve, for example, a stroke of 125 μm for a mirror of 50 mm diameter. We will present design criteria and tradeoffs for these mirrors. We characterize our mirrors by the maximum stroke they can deliver for various Zernike modes, under the boundary condition that the Zernike mode has to be created with a certain fidelity, usually defined by the Maréchal criterion.