Inline Process Analysis and Control using Optical Measurement for the Ultra-short Pulse Laser Ablation of CAD Designed Microstructures
Metadaten| Author: | M. Smarra, J. Hildenhagen, K. Dickmann |
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| ISBN: | 978-1-940168-05-0 |
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| Parent Title (English): | ICALEO Conference Proceedings (34. Intern. Congress on Applications of Lasers & Electro Optics in Atlanta, USA, Oct. 2015) ISBN: 978-1-940168-05-0 |
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| Document Type: | Part of a Book |
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| Language: | English |
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| Year of Completion: | 2015 |
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| Year of first Publication: | 2015 |
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| Release Date: | 2019/01/11 |
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| Edition: | Paper M704 |
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| First Page: | 172 |
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| Last Page: | 177 |
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| Faculties: | Physikingenieurwesen (PHY) |
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| Licence (German): |  Bibliographische Daten |
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