Development process for MEMS pressure sensors for standarized CMOS read-out circuitry
Author: | Wolfgang Schreiber-Prillwitz, Reinhart Job |
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DOI: | https://doi.org/10.1109/SBCCI.2016.7724037 |
Parent Title (English): | 29th Symposium on Integrated Circuits and Systems Design (SBCCI), IEEE Conference Publications |
Document Type: | Part of a Book |
Language: | English |
Year of Completion: | 2016 |
Year of first Publication: | 2016 |
Release Date: | 2019/01/11 |
First Page: | 1 |
Last Page: | 6 |
Faculties: | Elektrotechnik und Informatik (ETI) |
Publication list: | Job, Reinhart |
Licence (German): | Bibliographische Daten |