Material specific effects and limitations during ps-laser generation of micro structures
| Author: | J. Hildenhagen, U. Engelhardt, M. Smarra, K. Dickmann |
|---|---|
| DOI: | https://doi.org/10.1117/12.905948 |
| ISBN: | 978-0-8194-8890-9 |
| Parent Title (English): | Proceedings Volume 8247, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XII |
| Publisher: | SPIE |
| Place of publication: | USA |
| Document Type: | Part of a Book |
| Language: | English |
| Year of Completion: | 2012 |
| Year of first Publication: | 2012 |
| Release Date: | 2019/01/11 |
| First Page: | 824711, S. 1 |
| Last Page: | 7 |
| Faculties: | Physikingenieurwesen (PHY) |
| Licence (German): |  Bibliographische Daten |