TY - CHAP A1 - Jelinek, Moriz A1 - Johannes, G. A1 - Laven, Naveen A1 - Ganagona, Goud A1 - Job, Reinhart A1 - Schustereder, Werner A1 - Schulze, Hans-Joachim A1 - Rommel, Matthias A1 - Frey, Lothar T1 - Metastable Defects in Proton Implanted and Annealed Silicon T2 - P. Pichler (Editor): Gettering and Defect Engineering in Semiconductor Technology XVI (GADEST 2015) Y1 - 2016 SN - 978-3-03835-608-0 SP - 169 EP - 174 PB - Trans Tech Publications Ltd. CY - Zürich ER - TY - JOUR A1 - Johannes, G. A1 - Laven, Moriz A1 - Jelinek, Reinhart A1 - Job, Hans-Joachim A1 - Schulze, Werner A1 - Schustereder, Stefan A1 - Kirnstötter, Mathias A1 - Rommel, Lothar T1 - DLTS Characterization of Proton Implanted Silicon under Varying Annealing Conditions JF - Physica Status Solidi (b) Y1 - 2014 VL - 251 IS - 11 SP - 2189 EP - 2192 ER - TY - CHAP A1 - Jelinek, Moriz A1 - Johannes, G. A1 - Laven, Mathias A1 - Rommel, Werner A1 - Schustereder, Hans-Joachim A1 - Schulze, Lother A1 - Frey, Reinhart T1 - Deep-Level Defects in High-Dose Proton Implanted and High-Temperature Annealed Silicon T2 - E. Simoen, C. Claeys, O. Kakatsuka, R. Falster, C. Mazuré (Editors): High Purity Silicon XIII, ECS Transactions 64(11) Y1 - 2014 SP - 173 EP - 185 ER - TY - CHAP A1 - Jelinek, Moriz A1 - Johannes, G. A1 - Laven, Reinhart A1 - Job, Werner A1 - Schustereder, Hans-Joachim A1 - Schulze, Mathias A1 - Rommel, Lothar T1 - A New Method to Increase the Doping Efficiency of Proton Implantation in a High-Dose Regime T2 - E. Simoen, C. Claeys, O. Kakatsuka, R. Falster, C. Mazuré (Editors): High Purity Silicon XIII, ECS Transactions 64(11) Y1 - 2014 SP - 199 EP - 208 ER - TY - JOUR A1 - Johannes, G. A1 - Laven, Reinhart A1 - Job, Hans A1 - Schulze, -Joachim A1 - Niedernostheide, Franz-Josef A1 - Schustereder, Werner A1 - Frey, Lothar T1 - Activation and Dissociation of Proton-Induced Donor Profiles in Silicon JF - ECS Journal of Solid State Science and Technology Y1 - 2013 VL - 2 IS - 9 SP - 389 EP - 394 ER - TY - JOUR A1 - Job, Reinhart A1 - Johannes, G. A1 - Laven, Franz-Josef A1 - Niedernostheide, Hans-Joachim A1 - Schulze, Holger A1 - Schulze, Werner T1 - Defect Engineering for Modern Power Devices JF - Physica Status Solidi (a) Y1 - 2012 VL - 209 SP - 1940 EP - 1949 ER - TY - CHAP A1 - Johannes, G. A1 - Laven, Reinhart A1 - Job, Hans-Joachim A1 - Schulze, Franz-Josef A1 - Niedernostheide, Werner A1 - Schustereder, Lothar T1 - The Thermal Budget of Hydrogen-related Donor Profiles: Diffusion-limited Activation and Thermal Dissociation T2 - E. Simoen, C. L. Claeys, P. Stallhofer, R. Falster, C. Mazuré (Editors): High Purity Silicon 12, ECS Transactions 50(5) Y1 - 2012 SP - 161 EP - 175 ER - TY - CHAP A1 - Kirnstötter, Stefan A1 - Faccinelli, Martin A1 - Hadley, Peter A1 - Job, Reinhart A1 - Schustereder, Werner A1 - Johannes, G. A1 - Laven, Hans-Joachim T1 - Investigation of Doping Type Conversion and Diffusion Length Extraction of Proton Implanted Silicon by EBIC T2 - E. Simoen, C. L. Claeys, P. Stallhofer, R. Falster, C. Mazuré (Editors): High Purity Silicon 12, ECS Transactions 50(5) Y1 - 2012 SP - 115 EP - 120 ER - TY - CHAP A1 - Kirnstötter, Stefan A1 - Faccinelli, Martin A1 - Hadley, Peter A1 - Job, Reinhart A1 - Schustereder, Werner A1 - Johannes, G. A1 - Laven, Hans-Joachim T1 - Imaging Superjunctions in CoolMOS™ Devices using Electron Beam Induced Current T2 - G. Wirth, N. Morimoto, D. Vasileska (Editors): Microelectronics Technology and Devices - SBMicro 2012, ECS Transactions 49(1) Y1 - 2012 SP - 475 EP - 481 ER - TY - CHAP A1 - Johannes, G. A1 - Laven, Reinhart A1 - Job, W. A1 - Schustereder, H.-J. A1 - Schulze, F.- J. A1 - Niedernostheide, H. A1 - Schulze, L. T1 - Conversion Efficiency of Radiation Damage Profiles into Hydrogen-Related Donor Profiles T2 - W. Jantsch, F. Schäfer (Editors): Gettering and Defect Engineering in Semiconductor Technology XIV (GADEST 2011) Y1 - 2011 SP - 375 EP - 384 PB - Trans Tech Publications Ltd. CY - Zürich ET - 1 ER - TY - JOUR A1 - Johannes, G. A1 - Laven, Reinhart A1 - Job, Werner A1 - Schustereder, Hans-Joachim A1 - Schulze, Franz-Josef A1 - Niedernostheide, Holger A1 - Schulze, Lothar T1 - Conversion Efficiency of Radiation Damage Profiles into Hydrogen-Related Donor Profiles JF - Solid State Phenomena Y1 - 2011 VL - 178-179 SP - 375 EP - 384 ER -