TY  - CHAP
A1  - Schreiber-Prillwitz, Wofgang
A1  - Saukoski, Mikko
A1  - Chmiel, Gerhard
A1  - Job, Reinhart
T1  - Development of a Robust Design for Wet Etched Cointegrated Pressure Sensor Systems
T2  - F. W. DelRio, C. Eberl, M. P. de Boer, E. P. Guesev  (Editors): Microelectromechanical Systems - Materials and Devices IV, MRS Symposium Proceedings Series Vol. 1299
Y1  - 2011
SP  - 129
EP  - 134
ER  -