Dokument-ID Dokumenttyp Verfasser/Autoren Herausgeber Haupttitel Auflage Verlagsort Verlag Erscheinungsjahr Seitenzahl Schriftenreihe Titel Schriftenreihe Bandzahl Fachbereich Konferenzname Quelle:Titel Quelle:Jahrgang Quelle:Heftnummer Quelle:Erste Seite Quelle:Letzte Seite ISBN ISSN URN URL DOI Sprache Abstract OPUS4-650 Konferenzveröffentlichung Verpoort, Sven; Welp, Petra; Wittrock, Ulrich Novel unimorph deformable mirror for solid state laser resonators SPIE 2009 MEMS Adaptive Optics III, Proc. SPIE 72090N Physikingenieurwesen (PHY) urn:nbn:de:hbz:836-opus-6504 10.25974/fhms-650 eng We present a novel unimorph deformable mirror with a diameter of only 10 mm that will be used in adaptive resonators of high power solid state lasers. The relationship between applied voltage and deformation of a unimorph mirror depends on the piezoelectric material properties, layer thicknesses, boundary conditions, and the electrode pattern. An analytical equation for the deflection of the piezoelectric unimorph structure is derived, based on the electro-elastic and thin plate theory. The validity of the proposed analytical model has been proven by numerical finite-element modelling and experimental results. Our mirror design has been optimized to obtain the highest possible stroke and a high resonance frequency. OPUS4-653 Konferenzveröffentlichung Wittrock, Ulrich; Welp, Petra Adaptive laser resonator control with deformable MOEMS mirrors SPIE 2006 MEMS/MOEMS Components and Their Applications III, Proc. SPIE 6113 Physikingenieurwesen (PHY) 61130C urn:nbn:de:hbz:836-opus-6537 10.25974/fhms-653 deu Adaptive laser resonators with deformable MOEMS mirrors under closed-loop control are discussed and experimental results are presented. The requirements for deformable mirrors and for closed-loop control systems of these mirrors are analyzed. Several deformable mirrors have been characterized and the results are presented. Currently available membrane mirrors deform under laser load and need further development before they can be used for aberration correction of solid state lasers above some tens of Watts. Nevertheless, the results are encouraging and the requirements are within reach of currently available technology. Finally, we demonstrate an Nd.YVO4-laser with a closed-loop adaptive resonator and more than 6 W of output power. The closed-loop system was able to compensate artificially introduced aberrations from a phase plate.