@inproceedings{WittrockWelp2006, author = {Wittrock, Ulrich and Welp, Petra}, title = {Adaptive laser resonator control with deformable MOEMS mirrors}, series = {MEMS/MOEMS Components and Their Applications III, Proc. SPIE}, volume = {6113}, booktitle = {MEMS/MOEMS Components and Their Applications III, Proc. SPIE}, publisher = {SPIE}, doi = {10.25974/fhms-653}, url = {http://nbn-resolving.de/urn:nbn:de:hbz:836-opus-6537}, pages = {61130C}, year = {2006}, abstract = {Adaptive laser resonators with deformable MOEMS mirrors under closed-loop control are discussed and experimental results are presented. The requirements for deformable mirrors and for closed-loop control systems of these mirrors are analyzed. Several deformable mirrors have been characterized and the results are presented. Currently available membrane mirrors deform under laser load and need further development before they can be used for aberration correction of solid state lasers above some tens of Watts. Nevertheless, the results are encouraging and the requirements are within reach of currently available technology. Finally, we demonstrate an Nd.YVO4-laser with a closed-loop adaptive resonator and more than 6 W of output power. The closed-loop system was able to compensate artificially introduced aberrations from a phase plate.}, language = {de} }