@incollection{JelinekJohannesLavenetal.2016,
  author    = {Jelinek, Moriz and Johannes, G. and Laven, Naveen and Ganagona, Goud and Job, Reinhart and Schustereder, Werner and Schulze, Hans-Joachim and Rommel, Matthias and Frey, Lothar},
  title     = {Metastable Defects in Proton Implanted and Annealed Silicon},
  series = {P. Pichler (Editor): Gettering and Defect Engineering in Semiconductor Technology XVI (GADEST 2015)},
  booktitle = {P. Pichler (Editor): Gettering and Defect Engineering in Semiconductor Technology XVI (GADEST 2015)},
  publisher = {Trans Tech Publications Ltd.},
  address   = {Z{\"u}rich},
  isbn      = {978-3-03835-608-0},
  pages     = {169 -- 174},
  year      = {2016},
  language  = {en}
}