@article{GerkeBeckerRogallaetal.2016,
  author    = {Gerke, Sebastian and Becker, H.-W. and Rogalla, D. and Singer, F. and Brinkmann, N. and Fritz, S and Hammud, Adnan and Keller, P. and Skorka, D. and Sommer, D. and Weiß, C. and Flege, S. and Hahn, Giso and Job, Reinhard and Terheiden, Barbara},
  title     = {Influence of post hydrogenation upon electrical, optical and structural properties of hydrogen less sputter deposited amorphous silicon},
  series = {Thin Solid Films},
  volume    = {598},
  journal   = {Thin Solid Films},
  doi       = {10.1016/j.tsf.2015.11.063},
  pages     = {161 -- 169},
  year      = {2016},
  language  = {en}
}