@incollection{JelinekJohannesLavenetal.2014,
  author    = {Jelinek, Moriz and Johannes, G. and Laven, Mathias and Rommel, Werner and Schustereder, Hans-Joachim and Schulze, Lother and Frey, Reinhart},
  title     = {Deep-Level Defects in High-Dose Proton Implanted and High-Temperature Annealed Silicon},
  series = {E. Simoen, C. Claeys, O. Kakatsuka, R. Falster, C. Mazur{\´e} (Editors): High Purity Silicon XIII, ECS Transactions <u>64</u>(11)},
  booktitle = {E. Simoen, C. Claeys, O. Kakatsuka, R. Falster, C. Mazur{\´e} (Editors): High Purity Silicon XIII, ECS Transactions <u>64</u>(11)},
  pages     = {173 -- 185},
  year      = {2014},
  language  = {en}
}