@incollection{SchreiberPrillwitzSaukoskiChmieletal.2011,
  author    = {Schreiber-Prillwitz, Wofgang and Saukoski, Mikko and Chmiel, Gerhard and Job, Reinhart},
  title     = {Development of a Robust Design for Wet Etched Cointegrated Pressure Sensor Systems},
  series = {F. W. DelRio, C. Eberl, M. P. de Boer, E. P. Guesev (Editors): Microelectromechanical Systems - Materials and Devices IV, MRS Symposium Proceedings Series Vol. 1299},
  booktitle = {F. W. DelRio, C. Eberl, M. P. de Boer, E. P. Guesev (Editors): Microelectromechanical Systems - Materials and Devices IV, MRS Symposium Proceedings Series Vol. 1299},
  pages     = {129 -- 134},
  year      = {2011},
  language  = {en}
}