@article{KurthWangNickichetal.2025,
  author    = {Kurth and Wang and Nickich and Frank Pennartz and Marucie Ren{\´e} Nuys and Wolfhard Beyer},
  title     = {Raman spectroscopic analysis of the effect of annealing on hydrogen concentration and microstructure of thick hot wire grown a-Si:H films aimed as precursor layers for crystallized thin film silicon},
  journal   = {Thin Solid Films},
  volume    = {2020},
  number    = {Volume 714},
  doi       = {10.1016/j.tsf.2020.138353},
  year      = {2025},
}