TY  - JOUR
A1  - Xiao, S.
A1  - Gurevich, E. L.
A1  - Ostendorf, A.
T1  - Incubation effect and its influence on laser patterning of ITO thin film
T2  - Appl. Phys. A
Y1  - 2012
UR  - https://www.hb.fh-muenster.de/opus4/frontdoor/index/index/docId/11322
VL  - 107
SP  - 333
EP  - 338
ER  -