TY  - JOUR
A1  - Gerke, Sebastian
A1  - Becker, H.-W.
A1  - Rogalla, D.
A1  - Singer, F.
A1  - Brinkmann, N.
A1  - Fritz, S
A1  - Hammud, Adnan
A1  - Keller, P.
A1  - Skorka, D.
A1  - Sommer, D.
A1  - Weiß, C.
A1  - Flege, S.
A1  - Hahn, Giso
A1  - Job, Reinhard
A1  - Terheiden, Barbara
T1  - Influence of post hydrogenation upon electrical, optical and structural properties of hydrogen less sputter deposited amorphous silicon
T2  - Thin Solid Films
Y1  - 2016
UR  - https://www.hb.fh-muenster.de/opus4/frontdoor/index/index/docId/7061
VL  - 598
SP  - 161
EP  - 169
ER  -