TY  - CHAP
A1  - Schreiber-Prillwitz, Wolfgang
A1  - Job, Reinhart
T1  - Designing MEMS Pressure Sensors with Integrated Circuitry on Silicon for Miscellaneous Applications
T2  - 2013 IEEE Fourth Latin American Symposium on Circuits and Systems (LASCAS)
Y1  - 2013
UR  - https://www.hb.fh-muenster.de/opus4/frontdoor/index/index/docId/5324
SP  - 1
EP  - 4
ER  -