TY - JOUR A1 - Gurevich, E. L. A1 - Kittel, S. A1 - Hergenröder, R. A1 - Astrov, Yu A. A1 - Portsel, L. M. A1 - Lodygin, A. N. A1 - Tolmachev, V. A. A1 - Ankudinov, A. V. T1 - Modification of GaAs surface by low-current Townsend discharge T2 - J. Phys. D: Appl. Phys. N2 - The influence of stationary spatially homogeneous Townsend discharge on the (1 0 0) surface of semi-insulating GaAs samples is studied. Samples exposed to both electrons and ions in a nitrogen discharge Y1 - 2010 UR - https://www.hb.fh-muenster.de/opus4/frontdoor/index/index/docId/11329 SN - 0022-3727 VL - 43 SP - 275302 ER -