TY  - CHAP
A1  - Schreiber-Prillwitz, Wolfgang
A1  - Job, Reinhart
T1  - Development process for MEMS pressure sensors for standarized CMOS read-out circuitry
T2  - 29th Symposium on Integrated Circuits and Systems Design (SBCCI),  IEEE Conference Publications
Y1  - 2016
UR  - https://www.hb.fh-muenster.de/opus4/frontdoor/index/index/docId/8043
SP  - 1
EP  - 6
ER  -